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Predictive Simulation of Semiconductor Processing
Status and Challenges
Buch von Eicke R. Weber (u. a.)
Sprache: Englisch

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Beschreibung
Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.
Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.
Über den Autor

J. Dabrowski: Born in Warsaw, Poland, Sept. 29, 1958. PhD, Institute of Physics of the Polish Academy of Science (IF PAN), Warsaw, 1989. Scientific staff member IF PAN 1983-1992; postdoctoral fellow Fritz Haber Inbstitute of the Max Planck Society, Berlin, Germany, 1990-1991; postdoctoral fellow Xerox Palo Alto Research Center, California, 1992; since 1993 with IHP-microelectronics, Frankfurt (Oder), Germany. Conference series chairman, Challenges in Predictive Process Simulation (1997, 2000, 2002); international advisory commmittee member, International Training Institute for Materials Science, Hanoi, Vietnam. Project leader, German Research Society (1998-2000); von Neuman Institute for Computing (since 1993). Author (monograph), "Silicon surfaces and formation of interfaces; basic science in the industrial world" (World Scientific, 2000). Editor (book) , ""Recent Developments in Vacuum Science and Technology" (Research Signpost, 2003). Research in atomic diffusion mechanism in solid state; atomic structure of surfaces and semiconductor/dielectric interfaces; atomic structure of defects in semiconductors and insulators; signal processing for telecommunication. Achievements include discovery of atomic structure of the clean Si(113) surface; atomic structure of the main electron trap in GaAs (EL2 defect); atomic structure of the interface between a high-K dielectric (Pr2O3) and Si(001). Patents for silicon microelectronic technology; patents pending for telecommunication.

Zusammenfassung

Detailed and up-to-date explanation of the key processes in semiconductor technology and their computational simulation

Includes supplementary material: [...]

Inhaltsverzeichnis
1 Transistors and Atoms.- 2 Atomistic Simulations of Processes at Surfaces.- 3 Atomistic Simulations in Materials Processing.- 4 Atomistic Simulation of Decanano MOSFETs.- 5 Modeling and Simulation of Heterojunction Bipolar Transistors.- 6 Gate Oxide Reliability: Physical and Computational Models.- 7 High-K Dielectrics: The Example of Pr2O3.- 8 Atomistic Simulation of Si3N4 CVD from Dichlorosilane and NH3.- 9 Interconnects and Propagation of High Frequency Signals.- 10 Modeling of Electromigration in Interconnects.- 11 Predictive Modeling of Transition Metal Gettering: Applications and Materials Science Challenges.
Details
Erscheinungsjahr: 2004
Fachbereich: Atomphysik & Kernphysik
Genre: Mathematik, Medizin, Naturwissenschaften, Physik, Technik
Rubrik: Naturwissenschaften & Technik
Medium: Buch
Inhalt: xvii
490 S.
161 s/w Illustr.
16 farbige Illustr.
490 p. 177 illus.
16 illus. in color.
ISBN-13: 9783540204817
ISBN-10: 3540204814
Sprache: Englisch
Einband: Gebunden
Autor: Dabrowski, Jarek
Weber, Eicke R.
Redaktion: Weber, Eicke R.
Dabrowski, Jarek
Herausgeber: Jarek Dabrowski/Eicke R Weber
Hersteller: Springer-Verlag GmbH
Springer Berlin Heidelberg
Verantwortliche Person für die EU: Springer Verlag GmbH, Tiergartenstr. 17, D-69121 Heidelberg, juergen.hartmann@springer.com
Maße: 241 x 160 x 36 mm
Von/Mit: Eicke R. Weber (u. a.)
Erscheinungsdatum: 05.05.2004
Gewicht: 1,028 kg
Artikel-ID: 102480776
Über den Autor

J. Dabrowski: Born in Warsaw, Poland, Sept. 29, 1958. PhD, Institute of Physics of the Polish Academy of Science (IF PAN), Warsaw, 1989. Scientific staff member IF PAN 1983-1992; postdoctoral fellow Fritz Haber Inbstitute of the Max Planck Society, Berlin, Germany, 1990-1991; postdoctoral fellow Xerox Palo Alto Research Center, California, 1992; since 1993 with IHP-microelectronics, Frankfurt (Oder), Germany. Conference series chairman, Challenges in Predictive Process Simulation (1997, 2000, 2002); international advisory commmittee member, International Training Institute for Materials Science, Hanoi, Vietnam. Project leader, German Research Society (1998-2000); von Neuman Institute for Computing (since 1993). Author (monograph), "Silicon surfaces and formation of interfaces; basic science in the industrial world" (World Scientific, 2000). Editor (book) , ""Recent Developments in Vacuum Science and Technology" (Research Signpost, 2003). Research in atomic diffusion mechanism in solid state; atomic structure of surfaces and semiconductor/dielectric interfaces; atomic structure of defects in semiconductors and insulators; signal processing for telecommunication. Achievements include discovery of atomic structure of the clean Si(113) surface; atomic structure of the main electron trap in GaAs (EL2 defect); atomic structure of the interface between a high-K dielectric (Pr2O3) and Si(001). Patents for silicon microelectronic technology; patents pending for telecommunication.

Zusammenfassung

Detailed and up-to-date explanation of the key processes in semiconductor technology and their computational simulation

Includes supplementary material: [...]

Inhaltsverzeichnis
1 Transistors and Atoms.- 2 Atomistic Simulations of Processes at Surfaces.- 3 Atomistic Simulations in Materials Processing.- 4 Atomistic Simulation of Decanano MOSFETs.- 5 Modeling and Simulation of Heterojunction Bipolar Transistors.- 6 Gate Oxide Reliability: Physical and Computational Models.- 7 High-K Dielectrics: The Example of Pr2O3.- 8 Atomistic Simulation of Si3N4 CVD from Dichlorosilane and NH3.- 9 Interconnects and Propagation of High Frequency Signals.- 10 Modeling of Electromigration in Interconnects.- 11 Predictive Modeling of Transition Metal Gettering: Applications and Materials Science Challenges.
Details
Erscheinungsjahr: 2004
Fachbereich: Atomphysik & Kernphysik
Genre: Mathematik, Medizin, Naturwissenschaften, Physik, Technik
Rubrik: Naturwissenschaften & Technik
Medium: Buch
Inhalt: xvii
490 S.
161 s/w Illustr.
16 farbige Illustr.
490 p. 177 illus.
16 illus. in color.
ISBN-13: 9783540204817
ISBN-10: 3540204814
Sprache: Englisch
Einband: Gebunden
Autor: Dabrowski, Jarek
Weber, Eicke R.
Redaktion: Weber, Eicke R.
Dabrowski, Jarek
Herausgeber: Jarek Dabrowski/Eicke R Weber
Hersteller: Springer-Verlag GmbH
Springer Berlin Heidelberg
Verantwortliche Person für die EU: Springer Verlag GmbH, Tiergartenstr. 17, D-69121 Heidelberg, juergen.hartmann@springer.com
Maße: 241 x 160 x 36 mm
Von/Mit: Eicke R. Weber (u. a.)
Erscheinungsdatum: 05.05.2004
Gewicht: 1,028 kg
Artikel-ID: 102480776
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