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Sprache:
Englisch
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285,95 €
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Lieferzeit 1-2 Wochen
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Beschreibung
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
Über den Autor
James Moyne, Enrique del Castillo, Arnon M. Hurwitz
Inhaltsverzeichnis
Introduction. Background. Identifying Target Applications for Run-to-Run Control. Developing a Run-to-Run Solution: Run-to-Run Algorithms. Developing a Run-to-Run Solution: Practical Extensions to Algorithms. Developing and Deploying Run-to-Run Solutions: Integrating Control. Run-to-Run Control System Deployment Case Studies. Advanced Topics. Conclusions. References.
Details
| Erscheinungsjahr: | 2000 |
|---|---|
| Fachbereich: | Nachrichtentechnik |
| Genre: | Importe, Technik |
| Rubrik: | Naturwissenschaften & Technik |
| Medium: | Buch |
| Inhalt: | Einband - fest (Hardcover) |
| ISBN-13: | 9780849311789 |
| ISBN-10: | 0849311780 |
| Sprache: | Englisch |
| Einband: | Gebunden |
| Autor: |
Moyne, James
Hurwitz, A. M. |
| Redaktion: |
Moyne, James
Del Castillo, Enrique Hurwitz, Arnon M |
| Hersteller: | CRC Press |
| Verantwortliche Person für die EU: | Libri GmbH, Europaallee 1, D-36244 Bad Hersfeld, gpsr@libri.de |
| Maße: | 242 x 161 x 22 mm |
| Von/Mit: | James Moyne (u. a.) |
| Erscheinungsdatum: | 30.11.2000 |
| Gewicht: | 0,617 kg |
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